电子束曝光机激光工件台系统研制

介绍了nm级电子束曝光机激光定位精密工件台系统的结构组成、各部分技术措施及总体性能指标。该工件台采用HP5527激光干涉测量系统,测量分辨率达0.6nm,结构上成功将导向与承载分离,对承片台、机械手等进行重大创新。无论是整机性能还是关键技术单元均处于国内领先水平,是一台性能优良、高精度的电子束曝光机工件台。     

Corrosion morphology of AZ91D exposed in an atmospheric environment

The focused ion beam technique was employed to investigate the atmospheric corrosion morphology of AZ91D. It was found that the α matrix of the alloy was preferentially corroded in the areas adjacent to intermetallic phases. The most interesting finding was that the corrosion products in corrosion cavities were pelletlike, which has never been reported before.     

Structure, properties, and thermal stability of nanocrystallite Fe-Ti-N soft magnetic films

We deposited Fe-Ti-N magnetic films with a high sputtering power of 7 W/cm/sup 2/. When the composition of the films was in the range of Fe-Ti(3.9 at.%)-N(8.8 at.%) to Fe-Ti(3.3 at.%)-N(13.5 at.%), the films were composed of /spl alpha/' and Ti/sub 2/N precipitates. With the addition of nitrogen, 4/spl pi/M/sub s/ became higher than that of pure iron, reaching a maximum of 23.8 kG. At the same time, H/sub c/ was reduced to a minimum of 1.12 Oe. The best films can meet the needs of the recording head in dual-element giant magnetoresistive/inductive heads, yielding high storage density (10 Gb/in/sup 2/). The incorporation of N in /spl alpha/-Fe brought about the /spl alpha/' phase with its higher saturation magnetization. Ti additions inhibited the equilibrium decomposition /spl alpha/'/spl rarr//spl alpha/+/spl gamma/'. Because H/sub C//sup D//spl prop/D/sup 6/, where D is average grain diameter, grain size control is very important. The nitrogen induces severe distortion of the /spl alpha/' lattice, which can cause the grains to break into pieces and reduce the grain size. High sputtering power also led to the formation of fine grains, with diameter in the order of 14 nm. Probably Ti/sub 2/N is preferentially precipitated on the grain boundary, pinning the grain boundary and stabilizing the grain size during high-temperature heat treatment. The temperature limit for stability of the structure and its associated low coercivity was not less than 520/spl deg/C.     

Analysis and optimization of DS-CDMA systems with time-limited partial response chip waveforms

Conventional direct sequence code division multiple access systems (DS-CDMA) using offset quadrature phase shift key (OQPSK) usually employ a strictly bandlimited partial response square-root raised cosine pulse as the chip waveform. They have the disadvantage of large envelope fluctuation that will incur performance degradation due to the intermodulation and bandwidth enlargement caused by post nonlinear processing. To improve the performance of DS-CDMA systems, the chip waveform and receiver should be properly selected. This paper presents a systematic performance analysis of a matched filter receiver and zero-forcing filter (ZF) receiver for DS-CDMA using a time-limited partial response chip waveform. Nevertheless the systematic performance analysis is applicable to bandlimited chip pulse as well. For the zero-forcing filters, we propose to select the frequency responses that satisfy the first Nyquist criterion. With this class of filters, we can choose the roll-off factor to minimize the total power of multiple access interference and noise power. The zero-forcing filter with proper choice of roll-off factor, referred to as optimum ZF, yields a performance better than the matched filter counterpart. The bit error rate (BER) performance of the optimum ZF with superposed quadrature amplitude modulation signal as the time pulse waveform is evaluated. It is shown that the optimum ZF provides better BER performance than conventional OQPSK and minimum shift keying, and its envelope uniformity is much better than that of OQPSK.     

低阻VDMOSFET的优化设计与制造

文章对9926型双N沟增强型VDMOSFET进行了结构和版图的优化设计。给出了该器件的纵横向结构参数,材料的物理参数和版图总体结构。单胞结构的优化设计使单胞密度达到204万个/cm2,比国际市场现有产品的单胞密度(156万个/cm2)提高了30%。这种设计采用浅n+注入工艺可使器件生产成本下降31%。最后对研制结果进行了分析讨论。     

超临界流体萃取技术生产重交通道路沥青的研究

研究了采用超临界流体萃取技术(SFEF),以减压渣油和催化裂化油浆为原料,制备重交通道路沥青产品的可行性.结果表明:当原料中油浆掺入量为10%～30%时,可以生产出牌号为AH70,AH90,AH110的重交通道路沥青产品.工业试验表明,生产牌号为AH70,AH90的重交通道路沥青,采用此技术方案是可行的.     

Performance and Commercial Application of the Promoter LCC-A for Maximization of Propylene Yield

1 Introduction Propylene as an important feedstock for organic chemicals is mainly originated from steam cracking and catalytic cracking processes. During the FCC process the propylene content varies with the FCC catalyst and process technology adopted, resulting in significant difference in propylene concentration in the cracked product——LPG. The conventional FCC pro- cess generally gives a propylene yield of around 4%, while the FCC process with maximization of propylene yield can in…     

XMAC纵波时差高分辨率处理方法

在充分调研阵列声波测井分波提取方法的基础上，针对阿特拉斯公司的交叉多极子阵列声波测井（XMACⅡ）提供的单极波形信息，研究纵波时差提取及高分辨率处理方法。首先利用相关-互功谱法高精度地提取纵波时差，然后针对XMACⅡ仪器的接收阵列，研究组合子阵列的方法，形成共发射子阵列和共接收子阵列，最后利用子阵列对提取的纵波时差做高分辨率处理。处理现场实际测井资料，并将高分辨率处理成果与引进的eXpress软件处理成果、实测的国产高分辨率声波（纵波）测井曲线及岩心纵波时差对比分析，表明该方法提取的纵波时差曲线的纵向分辨率有很大提高，时差计算准确可靠，提取的单极纵波时差与国产高分辨率声波时差及岩心纵波时差的平均相对误差均小于7%。该方法具有较高的实用价值和广阔的应用前景。     

廊固凹陷大兴断层对油气分布的控制研究

廊固凹陷断裂系统复杂，其中大兴断层是中西部的控盆边界断层，它通过对凹陷的构造样式、沉积特征的控制进而影响整个凹陷的油气分布。从区域构造背景和盆地的沉积演化角度，按不同段落断裂展布的方向、产状的陡缓、对沉积的控制作用以及不同层段物质组份的差异，将大兴断层划分为4段：北段、中北段、中南段和南段，各段又可进一步分为上下不同的两段。各段断层的结构、形态、伴生构造、活动时间等都存在较明显差异，通过控制物源而控制沉积相的展布、储层物性和生储盖组合。相应的伴生构造和沉积物发育特征导致构造、构造-岩性组合控制了油气的分布：北段下段、中北段下段近湖一侧是廊固凹陷中西部有利的油气聚集带；中北段上段发育的生物气藏具有一定的勘探前景。